The introduction of free ions into a material by accelerating them, under the influence of a large electromagnetic field, through space into a target material such as a semiconductor wafer. Ion implantation is used in the semiconductor indus
The introduction of free ions into a material by accelerating them, under the influence of a large electromagnetic field, through space into a target material such as a semiconductor wafer. Ion implantation is used in the semiconductor industry to add dopants to wafers at low temperature, rather than to use high temperature diffusion or epitaxial deposition techniques.